采用多靶反应磁控溅射技术制备了一系列不同Si含量的Ti-Al-Si-N复合膜.采用能谱仪、X射线衍射仪、三维轮廓仪、原子力显微镜和显微硬度仪对薄膜进行表征,研究了Si含量对Ti-Al-Si-N复合膜微结构和力学性能的影响.结果表明:用Ti0.33Al0.67合金靶制备的Ti-Al-N复合膜呈双相共存结构(fcc+hcp),Si的加入,促进了六方相的生长,细化了晶粒,降低了表面粗糙度.随着Si含量的增加,Ti-Al-Si-N复合膜的硬度逐渐增大,在Si含量为16.69 at%时,达到最大硬度32.3 GPa,继续增加Si含量,薄膜硬度降低.
参考文献
| [1] | M. Pfeiler;K. Kutschej;M. Penoy .The effect of increasing V content on structure, mechanical and tribological properties of arc evaporated Ti-Al-V-N coatings[J].International Journal of Refractory Metals & Hard Materials,2009(2):502-506. |
| [2] | Zhang, XH;Jiang, JQ;Yuqiao, Z;Lin, JL;Wang, FL;Moore, JJ .Effect of carbon on TiAlCN coatings deposited by reactive magnetron sputtering[J].Surface & Coatings Technology,2008(5/7):594-597. |
| [3] | Yongjing Shi;Siyuan Long;Shicai Yang;Fusheng Pan .Structural and tribological properties of CrTiAIN coatings on Mg alloy by closed-field unbalanced magnetron sputtering ion plating[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2008(22):7342-7350. |
| [4] | Huang, PK;Yeh, JW .Effects of nitrogen content on structure and mechanical properties of multi-element (AlCrNbSiTiV)N coating[J].Surface & Coatings Technology,2009(13):1891-1896. |
| [5] | Smith I J;Gillibrand D;Brooks J S et al.Dry cutting performance of HSS twist drills coated with improved TiAlN[J].Surface and Coatings Technology,1997,90(1-2):164-171. |
| [6] | Prengel HG.;Santhanam AT.;Pfouts WR. .State of the art in hard coatings for carbide cutting tools[J].Surface & Coatings Technology,1998(3):183-190. |
| [7] | 宋昌才.新型TiAlN涂层铣刀的高速切削性能[J].工具技术,2002(06):14-18. |
| [8] | Ming Kong;Nan Shao;Yunshan Dong .Growth, microstructure and mechanical properties of (Ti, Al)N/VN nanomultilayers[J].Materials Letters,2006(7):874-877. |
| [9] | Donghai Yu;Chengyong Wang;Xiaoling Cheng;Fenglin Zhang .Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2009(17):4950-4955. |
| [10] | 喻利花,董松涛,钟春良,董师润,许俊华.磁控溅射Ti1-xAlxN薄膜的微结构及性能研究[J].金属热处理,2008(11):55-58. |
| [11] | Kawate M.;Hashimoto AK.;Suzuki T. .Oxidation resistance of Cr1-xAlxN and Ti1-xAlxN films[J].Surface & Coatings Technology,2003(2):163-167. |
| [12] | Min Zhou;Y. Makino;M. Nose;K. Nogi .Phase transition and properties of Ti-Al-N thin films prepared by r.f.-plasma assisted magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):203-208. |
| [13] | Hasegawa H;Kimura A;Suzuki T .Ti1-xAlxN,Ti1-xZrxN and Ti1-xCrxN films synthesized by the AIP method[J].Surface and Coatings Technology,2000,132(01):76-79. |
| [14] | Colligon J S;Vishnyakov V;Valizadeh R et al.Study of nanocrystailine TiN/Si3N4 thin films deposited using a dual ion beam method[J].Thin Solid Films,2005,485(1-2):148-154. |
| [15] | Carvalho S.;Ribeiro E.;Rebouta L.;Pacaud J.;Goudeau P.;Renault PO. Riviere JP.;Tavares CJ. .PVD grown (Ti,Si,Al)N nanocomposite coatings and (Ti,Al)N/(Ti,Si)N multilayers: structural and mechanical properties[J].Surface & Coatings Technology,2003(2/3):109-116. |
| [16] | Vennemunn A;Stock H R;Kohlscheen J et al.Oxidation resistance of titanium-aluminium-silicon nitride coating[J].Surface and Coatings Technology,2003,174-175:408-415. |
| [17] | Xu H;Nie X;Wei R .Tribological behavior of a TiSiCN coating tested in air and coolant[J].Surface & Coatings Technology,2006(7):4236-4241. |
| [18] | Pfeiler, M;Zechner, J;Penoy, M;Michotte, C;Mitterer, C;Kathrein, M .Improved oxidation resistance of TiAlN coatings by doping with Si or B[J].Surface & Coatings Technology,2009(20/21):3104-3110. |
| [19] | Kutschej K;Mayrhofer P H;Kathrein M.Austria Reutte Plansee[A].,2005 |
| [20] | Chi-Lung Chang;Jyh-Wei Lee;Ming-Don Tseng .Microstructure, corrosion and tribological behaviors of TiAlSiN coatings deposited by cathodic arc plasma deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2009(17):5231-5236. |
| [21] | Carvalho, S;Rebouta, L;Ribeiro, E;Vaz, F;Tavares, CJ;Alves, E;Barradas, NP;Riviere, JP .Structural evolution of Ti-Al-Si-N nanocomposite coatings[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2009(10):1206-1212. |
| [22] | Pelisson A;Parlinska-Wojtan M;Hug HJ;Patscheider J .Microstructure and mechanical properties of Al-Si-N transparent hard coatings deposited by magnetron sputtering[J].Surface & Coatings Technology,2007(4/7):884-889. |
| [23] | Klung H P;Alexander L E.X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials[M].New York:wiley,1974 |
| [24] | 胡晓萍,李戈扬,戴嘉维,丁正明,顾明元.Si含量和基片温度对Ti-Si-N纳米复合薄膜的影响[J].上海交通大学学报,2003(02):252-256. |
| [25] | Tukadoum J;Bennani H H .Influence of substrate toughness and coating thickness on adhesion,friction and wear of TiN films[J].Surface and Coatings Technology,1997,96(2-3):272-282. |
| [26] | 秦聪祥,曾鹏,胡社军,汝强,吴键.Si含量对电弧沉积TiAlSiN薄膜性能的影响[J].电镀与涂饰,2006(06):15-17. |
| [27] | Veprek S .Conventional and new approaches towards the design of novel superhard materials[J].Surface & Coatings Technology,1997(1/3):15-22. |
| [28] | Veprěk S;Reiprich S .A concept for the design of novel superhard coatings[J].Thin Solid Films,1995,268(1-2):64-71. |
| [29] | Hultman L;Bareno J;Flink A;Soderberg H;Larsson K;Petrova V;Oden M;Greene JE;Petrov I .Interface structure in superhard TiN-SiN nanolaminates and nanocomposites: Film growth experiments and ab initio calculations[J].Physical review, B. Condensed matter and materials physics,2007(15):5437-1-5437-6-0. |
| [30] | 孔明,胡晓萍,董云杉,李戈扬,顾明元.Ti-Si-N复合膜的界面相研究[J].物理学报,2005(08):3774-3779. |
| [31] | Kato M;Mori T;Schwartz L H .Hardening by spinodal modulated structure[J].Acta Metallurgica,1980,28(03):285-290. |
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