采用直流磁控溅射法制备了TbFe/feAl超磁致伸缩多层膜,研究了FeAl薄膜的复合对TbFe薄膜磁性能以及热处理温度对TbFe/FeAl磁致伸缩多层膜磁致伸缩系数的影响.结果表明.ThFe层与FeAl层之间的交换耦合作用以及热处理能明显提高薄膜的软磁性能和磁致伸缩性能;与TnFe单层膜相比,TbFe/FeAl多层膜水平方向的矫顽力从59.2kA·m-1降低到29.6kA·m-1;经最佳退火处理(350℃×60min),获得了较低的饱和磁场强度和矫顽力,分别为H =96kA·m-1和,H =16kA·m-1;外加磁场400kA·m-1时,ThFe/FeAl磁致伸缩多层膜磁致伸缩系数可达574×10-6.
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