探讨了掺钨类金刚石（W—DLC）膜沉积及离子渗硫两步合成DLC和WS2复合固体润滑膜的新方法。利用低温离子渗硫技术对4种钨含量的W—DLC膜进行离子渗硫处理，采用扫描电子显微镜（SEM）、俄歇扫描探针（SAM）、X射线光电子能谱（XPS）、拉曼光谱仪（Raman），纳米硬度计（Nano—indenter）和摩擦磨损试验机考察了渗硫处理后W．DLC膜的微观结构与摩擦学性能。结果表明：渗硫处理使W—DLC膜中生成了WS2，促进了DLC膜的石墨化，并降低了其纳米硬度；随钨含量增加，渗硫处理的W—DLC膜纳米硬度逐渐升高，摩擦系数和磨损率逐渐减小，渗硫后的27．7％W—DLC膜表现出最优异的摩擦学性能。
A new method for synthesizing W-doped diamond-like carbon (W-DLC) with WS2 composite solid lubrication film by deposition and low temperature ion sulfuration technology was studied. W-DLC films with different W contents were prepared. Microstructure, nanohardness and tribological behavior of the sulfurized W-DLC film were investigated by means of scanning electron microscopy (SEM) , scanning Auger microscopy ( SAM ), X-ray photoelectron spectroscopy ( XPS), Raman spectroscopy ( Raman), Nano-indentation, friction and wear tester. The results show that WS2 is formed and the content of sp2 - C increases on the surface of W-DLC film after ion sulfuration, which makes the hardness of W-DLC film decrease. The nanohardness of the sulfurized W-DLC film rises with the increase of W content in the film while the friction coefficient and the wear rate decreases with the rise of W content in the film. The sulfurized W- DLC film with the W content of 27.7% exhibits the lowest friction coefficient and wear rate.
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