采用离子束沉积技术在医用Ti6Al4v合金表面制备类金刚石薄膜(DLC),利用原子力显微镜、Raman光谱、X射线光电子能谱(XPS)及UMT.2摩擦磨损试验机对薄膜的形貌、结构、摩擦学性能进行表征.采用动电位极化对涂层前后基底的耐腐蚀性能进行测试.结果表明:制备薄膜为类金刚石碳结构,基底偏压对薄膜形貌、结构有较大影响;偏压为-100 V时制备的薄膜表面粗糙度低(6.5mm),sp3/sp2比值高,摩擦学性能优异;经DLC膜保护的合金基底耐腐蚀性能获得明显改善.
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