以醋酸锶、醋酸钡和钛酸四丁酯为前驱体原料,采用溶胶-凝胶(Sol-gel)法,利用旋转涂覆工艺,采用不同的热处理工艺制备了组分为Ba/Sr=0.65/0.35的Ba0.65Sr0.35TiO3薄膜.采用XRD、SEM和阻抗分析仪分析薄膜的结晶、表面形貌和介电性能.研究了不同热处理工艺对BST薄膜晶化行为、结构和性能的影响.结果表明,最佳热分解温度和时间为400 ℃和30 min,最佳升温速率为0.5～1 ℃;经650 ℃热处理后,BST薄膜已基本形成ABO3型钙钛矿结构,随着热处理温度的提高,薄膜的结晶程度提高,且沿(110)晶面择优取向.经750 ℃热处理的BST薄膜表面光滑致密无裂纹,颗粒均匀分布,晶粒发育较好,且介电性能最佳.
参考文献
| [1] | 李厚刚,徐友龙,王风雨,王杰.sol-gel法制备的BST薄膜的晶化行为研究进展[J].电子元件与材料,2005(03):54-58. |
| [2] | Xinhua Zhu;Nui Chong;Helen Lai-Wah Chan;Chung-Loong Choy;Kin-Hung Wong;Zhiguo Liu;Naiben Ming .Epitaxial growth and planar dielectric properties of compositionally graded (Ba_(1-x)Sr_(x))TiO_(3) thin films prepared by pulsed-laser deposition[J].Applied physics letters,2002(18):3376-3378. |
| [3] | Cheol S J;Seong H C;Joon K H .Electrical conduction properties of sputter-grown (Ba,Sr)TiO3 thin flims having IrO2 electrodes[J].Applied Physics Letters,2002,76(12):1609-1671. |
| [4] | 王根水,赖珍荃,于剑,孟祥建,孙憬兰,郭少令,褚君浩,金承钰,李刚,路庆华.化学溶液法制备的Ba0.9Sr0.1TiO3薄膜的结构及光学特性研究[J].红外与毫米波学报,2002(01):37-40. |
| [5] | Jian-Gong Cheng;Jun Tang;Jun-Hao Chu .Pyroelectric properties in sol-gel derived barium strontium titanate thin films using a highly diluted precursor solution[J].Applied physics letters,2000(7):1035-1037. |
| [6] | Jian-Gong Cheng;Jun Tang;Xiang-Jian Meng .Fabrication and Characterization of Pyroelectric Ba_(0.8)Sr_(0.2)TiO_3 Thin Films by a Sol-Gel Process[J].Journal of the American Ceramic Society,2001(7):1421-1424. |
| [7] | Dalberth MJ.;Price JC.;Rogers CT.;Galt D.;Stauber RE. .Improved low frequency and microwave dielectric response in strontium titanate thin films grown by pulsed laser ablation[J].Applied physics letters,1998(4):507-509. |
| [8] | Ezhilvalavan S.;Tseng TY. .Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs [Review][J].Materials Chemistry and Physics,2000(3):227-248. |
| [9] | Braunstein G;Paz-Pujalt G R .The process of formation and epitaxial alignment of SrTiO3 thin films prepared by metallo-organic decomposition[J].Journal of Applied Physics,1993,73:961-970. |
| [10] | Maria C.Gust;Leslie A.Momoda;Neal D.Evans .Crystallization of Sol-Gel-Derived Barium Strontium Titanate Thin Films[J].Journal of the American Ceramic Society,2001(5):1087-1092. |
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