介绍了用MOCVD技术沉积镍膜的应用状况,以及几种典型前驱体的沉积性能.着重介绍了羰基镍的沉积特性.结合MOCVD技术的最新进展,对镍的化学气相沉积技术作了简要的展望.
参考文献
| [1] | Balog S .Chemical vapor deposition of nickel molds 66th annual Technological Conference[J].American Electroplating Society,1979,66(05):1. |
| [2] | Fau-Canillac F;Maury F .[J].Surface and Coatings Technology,1994,64:21. |
| [3] | Chan R K;McIntosh R .[J].Canadian Journal of Chemistry,1962,40:845. |
| [4] | Clements P J;Sale F R .[J].Metallurgical and Materials Transactions B:Process Metallurgy and Materials Processing Science,1976,7B:435. |
| [5] | 凯姆W;黄仲涛.Cl化学催化[M].北京:化学工业出版社,1989:40. |
| [6] | Burkin A R.Crtical Reports on Applied Chemistry[M].,1987:29. |
| [7] | Campbell A N;Mullendore A W;Hills C R .[J].Journal of Materials Science,1988,23:4049. |
| [8] | Dormans G J M .[J].Journal of Crystal Growth,1991,108:806. |
| [9] | Stauf G T;Driscoll D C;Dowben P A .[J].Thin Solid Films,1987,153:421. |
| [10] | Yeh W C;Matsumura M .[J].Japanese Journal of Applied Physics Part 1,1997,36:6884. |
| [11] | Hwang SD.;Dowben PA.;Mcilroy DN.;Remmes N. .NICKEL DOPING OF BORON-CARBON ALLOY FILMS AND CORRESPONDING FERMI LEVEL SHIFTS[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,1997(3 Pt.1):854-859. |
| [12] | Faudon J F;Senocq F .[J].Journal of Catalysis,1993,144:460. |
| [13] | Grankin V M .[J].The Electrochemical Society Interface,1997,25:89. |
| [14] | Ben-Dor L.;Greenberg JH. .Equilibrium composition in II-VI telluride MOCVD systems[J].Journal of Crystal Growth,1999(Pt.2):1151-1156. |
| [15] | Maury F;Gueroudji L .[J].Surface and Coatings Technology,1996,86-87:316. |
| [16] | Callear A B .[J].Proceedings of the Royal Society A:Mathematical,Physical & Engineering Sciences,1961,256:71. |
| [17] | Chung JW.;Ohuchi FS.;Dai ZR. .WS2 thin films by metal organic chemical vapor deposition[J].Journal of Crystal Growth,1998(1/2):137-150. |
| [18] | Yu Guangyou;Fan X W;Zhang J Y et al.[J].Journal of Crystal Growth,1999,196:77. |
| [19] | Komatsu Y;Sato T;Ito S et al.[J].Thin Solid Films,1999,341:132. |
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