沉积在ZrN,TaN阻挡层上的Cu膜分别在真空和氢气、氮气的混合气氛下退火.利用SEM、XRD和电阻率来表征多层膜的热稳定性.实验结果表明:对于沉积在同种阻挡层上的多层膜在混合气氛中退火的热稳定性较真空退火的要高.对真空退火处理,沉积在ZrN阻挡层上的多层膜的热稳定性比沉积在TaN阻挡层上的要高.研究结果表明:多层膜的热稳定性的评价不仅跟多层膜本身的因素有关,如阻挡层的种类,还和退火气氛有关.
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