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本文使用直接模拟Monte Carlo法对三维直微通道内的气体流动进行了数值模拟,对比了不同截面形状的通道不同驱动压差的情况,探讨了截面形状对微通道内气体流动三维效应的影响以及三维效应对流量-压差关系的影响.

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