在覆盖金属钛层的陶瓷上,利用微波等离子体化学气相沉积(MPCVD)法制备出类球状微米金刚石聚晶薄膜.利用扫描电子显微镜、拉曼光谱、X射线衍射,分析了薄膜的结构和表面形貌.测试了类球状微米金刚石聚晶膜的场致电子发射特性.开启电场仅为0.55V/μm,在2.18V/μm的电场下,其场发射电、流密度高达11mA/cm2.对类球状微米金刚石聚晶阵列形成机理和场发射机理进行了研究.
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