材料期刊网

Hexagonal AIN films have been obtained by arc ion plating at different negative biases. X-ray diffraction and scanning electron microscopy results show that AIN films with smooth surfaces and (002) preferred orientation are obtained at low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. The formation mechanism of AIN is analyzed and the experiment results are discussed. The effect of bias on adhesion strength has also been examined.