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本文先用直流磁控溅射法分别在ITO导电玻璃基底上沉积TiO2和TiN二种纳米薄膜,再在500℃的马弗炉氧化性气氛下进行退火处理,制得TiO2/ITO和TiO2-xNx/ITO薄膜电极。样品的结构和成分用XRD和XPS进行表征。然后分别采用pH=10的Na2CO3/NaHCO3缓冲溶液和1M KOH水溶液作为电解液,在三电极体系中用线性扫描伏安法(LSV)和电流时间曲线(i-t)法测定二种薄膜电极在光照和暗态下的光电化学性能。研究结果表明:以1M KOH水溶液作为电解液比pH=10的Na2CO3/NaHCO3缓冲溶液作为电解液更有利于样品发挥其光催化活性;同时,TiO2-xNx/ITO薄膜电极比TiO2/ITO具有更好的光电化学性能。

Two kinds of film electrodes,TiO2/ITO and TiO2-xNx/ITO were prepared by depositing TiO2 and TiN on ITO substrates using dc reactive magnetron sputtering and then annealed in an oxidative furnace at 500℃.The crystal structure and chemical composition of the film electrodes were characterized by X-ray diffractometry(XRD) and X-ray photoelectron spectroscopy(XPS).The photoelectrochemical properties of the electrodes were analyzed by testing their LSV and i-t curves under light and in dark,with the two solutions of Na2CO3/NaHCO3(pH=10) and 1M KOH as electrolytes,respectively,for comparation.It shows that the electrolyte of 1M KOH was better for TiO2 and TiO2-xNx photoelectrochemical properties than Na2CO3/NaHCO3(pH=10),and TiO2-xNx/ITO has better photoelectrochemical properties than TiO2/ITO.

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