综述了CVD金刚石的晶体形态及界面位向关系.用SEM观察CVD金刚石晶粒形态主要有立方体、长方体、八面体、立方八面体、孪晶八面体、十面体和二十面体颗粒以及球形金刚石,讨论了晶粒的形成条件.用TEM观察则主要有单晶体、孪晶八面体和五重孪晶体形态.界面位向关系主要有:Si(001)//Diamond(001),Si<110>//Diamond<110(50078018);Si(111)//Diamond(111),Si<110>//Diamond<110>和Si(110)//Diamond(110),Si[110]//Diamond[111].
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