采用0-3复合法制备PZT(PbZr0.52Ti0.48O3)厚膜,通过陈化、静置、去除沉淀颗粒、浓缩等方法改良了浆料配制工艺,大大改善了厚膜的表面粗糙度,制备出适于微压电换能器使用的PZT厚膜.采用单层退火的方式对厚膜进行了结晶热处理,研究了不同结晶温度对厚膜性能的影响.结果表明:改良的浆料配制工艺,明显降低了厚膜的表面粗糙度,大大改善了表面形貌;随着热处理温度的升高,厚膜的晶粒尺寸变大,剩余极化变大,矫顽场变小,粗糙度有增大的趋势;当结晶温度为700℃时,剩余极化达到15μC/cm2,矫顽场为30.5 kV/cm.
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