研究了阳极氧化三氧化二铝多孔膜的制备工艺,采用两步阳极氧化法和独特的后处理工艺获得了孔洞分布均匀、孔径大小一致且耐水合的多孔氧化膜,分析了传感器的湿敏特性:传感器的湿滞<2%,响应时问<10s,恢复时间<40s,性能非常优良.
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