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利用离子束辅助沉积技术和低温离子渗硫技术制备了二硫化钨/钨掺杂类金刚石(WS2/W-DLC)复合薄膜.采用扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、透射电子显微镜(TEM)、纳米硬度仪(Nano-indenter)和多功能摩擦磨损试验机(UMT)考察了薄膜的微观结构与摩擦学性能.结果表明:制备的薄膜在大气环境下表现出优异的力学性能和超低摩擦的性能,该复合薄膜中,硬质强化相纳米碳化物WC1-x和软质润滑相过渡族金属硫化物WS2、FeS均匀镶嵌于类金刚石基体内形成复合结构,复合结构是薄膜表现出优异性能的主要原因.

参考文献

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