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采用NH3为N源,以Ga2O3粉末为Ga源高温氨化形成GaN粉末.用X射线衍射(XRD)、扫描电子显微镜(SEM)、选择区电子衍射(SAED)对粉末进行结构、形貌分析.结果表明:当Ga源温度为850℃时得到六方纤锌矿结构的GaN晶体颗粒.

参考文献

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