(La0.5Sr0.5)CoO3为电极的Pb(Zr0.4Ti0.6)O3和Pb(Zr0.2Ti0.8)O3铁电电容器结构及电学性能

人工晶体学报, 2013, 42(1): 129-133.

(La0.5Sr0.5)CoO3为电极的Pb(Zr0.4Ti0.6)O3和Pb(Zr0.2Ti0.8)O3铁电电容器结构及电学性能

贾冬梅 ^1, , 刘保亭 ^2, , 彭增伟 ^3, , 郝彦磊 ^4, , 朱慧娟 ^5, , 张宪贵 ^6,

1.河北大学物理科学与技术学院,保定071002

2.河北大学物理科学与技术学院,保定071002

3.河北大学物理科学与技术学院,保定071002

4.河北大学物理科学与技术学院,保定071002

5.河北大学物理科学与技术学院,保定071002

6.河北大学物理科学与技术学院,保定071002

基金项目: 河北省应用基础研究计划重点项目(10963525D) 国家自然科学基金(11074063) 高等学校博士点基金(20091301110002)

关键词： Pb(Zr1-xTix)O3 , 铁电电容器 , 溶胶-凝胶 , 矫顽场 , 脉宽依赖性 , 疲劳特性

Structure and Electrical Properties of Pb(Zr0.4Ti0.6)O3 and Pb(Zr0.2Ti0.8)O3 Ferroelectric Capacitors Based on (La0.5Sr0.5)CoO3 Electrode

分别采用磁控溅射法和溶胶-凝胶法(Sol-gel)制备了(La0.5Sr0.5)CoO3 (LSCO)和Pb(Zr1-xTix)O3(PZT)薄膜,在Pt(111)/Ti/SiO2/Si基片上构架了LSCO/Pb(Zr0.4Ti0.6)O3(PZT(40/60))/LSCO和LSCO/Pb(Zr0.2Ti0.8)O3(PZT(20/80))/LSCO铁电电容器,研究了两种铁电电容器的结构和性能.XRD结构分析表明:两种四方相的不同Zr/Ti比例的PZT薄膜均为结晶良好的多晶钙钛矿结构.在5V测试电压下,LSCO/PZT(40/60)/LSCO和LSCO/PZT(20/80)/LSCO两种铁电电容器的剩余极化强度(Pr)和矫顽场(Ec)分别为:28μC/cm2和1.2V以及32μC/cm2和2V.相对于PZT(40/60),PZT(20/80)具有较大的剩余极化强度和矫顽场,是由于其矩形度(c/a)较大.两种电容器都具有较好的脉宽依赖性和抗疲劳性.在5V的测试电压下,LSCO/PZT(40/60)/LSCO电容器的漏电流密度为3.2 × 10-5 A/cm2,LSCO/PZT(20/80)/LSCO电容器的漏电流密度为3.11×10-4 A/cm2,经拟合分析发现:在0～5 V的范围内,两种电容器都满足欧姆导电机制.

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