退火温度和涂膜层数对溶胶-凝胶法制备ZnO薄膜微结构及光学特性的影响

人工晶体学报, 2013, 42(3): 516-528.

退火温度和涂膜层数对溶胶-凝胶法制备ZnO薄膜微结构及光学特性的影响

袁欢 ^1, , 徐明 ^2, , 黄勤珍 ^3, , 刘以良 ^4, , 张丽 ^5,

1.西南民族大学电气信息工程学院,信息材料四川省重点实验室,成都610041

2.西南民族大学电气信息工程学院,信息材料四川省重点实验室,成都610041

3.西南民族大学电气信息工程学院,信息材料四川省重点实验室,成都610041

4.西南民族大学电气信息工程学院,信息材料四川省重点实验室,成都610041

5.西南民族大学电气信息工程学院,信息材料四川省重点实验室,成都610041

基金项目: 西南民族大学研究生学位点建设项目(2012XWD-S0805) 四川省学术和技术带头人培养基金(25727501)

关键词： ZnO薄膜 , 溶胶-凝胶 , 透射率 , 光致发光

Influence of Annealing Temperature and Coating Layers on the Microstructure and Optical Properties of ZnO Thin Films Fabricated by Sol-gel Method

采用溶胶-凝胶法在玻璃基片上制备了ZnO薄膜,研究了退火温度和涂膜层数对ZnO薄膜结晶性和光学特性的影响.扫描电镜(SEM)结果表明,退火温度的升高使得薄膜致密性和均匀性均得到改善.旋涂10层以上的薄膜其表面形貌明显要好于旋涂5层的薄膜样品,但旋涂10层和20层的薄膜其形貌和微结构差异并不显著.XRD图谱表明所有样品都具有纤锌矿结构,随着热处理温度的升高,各衍射峰强度增大,晶粒尺寸变大.光致发光(PL)测量显示,退火温度越高,涂膜层数越少,其PL谱发光强度越强.紫外-可见透过谱发现,涂膜层数越少,透射率越高；而提高退火温度也有助于改善薄膜透射率.结合已得到的微结构信息,对观察到的光学性能进行了合理解释,综合认为旋涂10层并在600℃退火是溶胶凝胶法制备ZnO薄膜的最佳生长条件.

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