采用高分子辅助化学溶液沉积法,在Sr-TiO3(STO)单晶基底上制得了一系列高温超导涂层导体BaZrO3(BZO)缓冲层。研究结果表明,不同高分子辅助沉积的BZO缓冲层其形貌和织构差异较大。利用聚乙烯醇缩丁醛(PVB)辅助制得BZO缓冲层表面更加平整致密,无裂纹存在,并具有优异的双轴织构。通过台阶仪测试该BZO缓冲层的膜厚,结果显示膜厚超过250nm。
Polymer additives were proposed to assist with the deposition of BaZrO3(BZO) buffer layers on the SrTiO3(STO) single crystal substrate.Effects of different additives on the quality of final BZO were investigated.The investigation reveals that BZO yielded by polyvinyl butyral(PVB) displays a smooth and crack-free surface,and has an excellent in-plan and out-plan orientation.Additionally,a test with a surface profile shows that the thickness is over 250nm.These results indicate that polymer(PVB)-assisted chemical solution deposition may be an effective measure to obtain thick and high-quality BZO buffer layers.
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