为提升钽酸锂薄膜的性能,提出一种离子束增强沉积法制备钽酸锂薄膜的新工艺.分别采用这种新工艺和溶胶-凝胶法制备了钽酸锂薄膜,并利用阻抗分析仪和铁电材料分析仪对制备样品进行了介电性能、铁电特性、漏电电流和热释电特性分析.实验结果表明,采用离子束增强沉积制备的钽酸锂样品经550℃退火后,介电常数为39.44,介电损耗为0.045;测试电场强度为400kV/cm时,漏电流为4.76×10-8 A/cm2,击穿场强为680kV/cm,热释电系数达到1.82×10-4/m2K.相比之下,采用溶胶-凝胶方法制备的钽酸锂薄膜样品,其介电常数、介电损耗、漏电流都更大,击穿场强和热释电系数更低.从电性能参数比较可以看出,离子束增强沉积法比溶胶-凝胶法更适合用于制备钽酸锂薄膜.
参考文献
| [1] | Norkus V,Gerald G,and Hofmann G.Process technology for high-resolution infrared detectors based on LiTaO3[C].Proceedings of SPIE-The International Society for Optical Engineering,1999,3892:233~240.,1999. |
| [2] | 张德银,黄大贵,李金华,李坤.LiTa308薄膜制备与电性能研究[J].无机材料学报,2008(06):1106-1110. |
| [3] | 张德银,黄大贵,董政.溶胶凝胶钽酸锂薄膜热释电红外探测器的设计与制备[J].光电工程,2006(12):113-118. |
| [4] | Ming-cheng Kao,Maw-shung Lee,Chih-ming Wang,et al .Properties of LiTaO3 thin films derived by a diol-based Sol-Gel process[J].Japanese Journal of Applied Physics,2002,41 |
| [5] | Deyin Zhang,Wentian Luo,Yong Bao,et al.Thickness effect and etching implement of silicon substrate of LiTaO3 thin film infrared detector[C].Proceedings of SPIE-The International Society for Optical Engineering,2010,7658:76580Q-1~76580Q-6.,2010. |
| [6] | Nougaret L,Combette P,Pascal-Delannoy F .Growth of lithium tantalate thin films by radio-frequency magnetron sputtering with lithium enriched target[J].Thin Solid Films,2009,517 |
| [7] | Deyin Zhang,Dagui Huang,Yanqiu He.Intelligent temperature control strategy for LiTaO3 thin films deposition process[C].IEEE Proceedings of the 2004 International Conference on Intelligent Mechatronics and Automation,2004,339~344.,2004. |
| [8] | Satapathy S,Verma P,Gupta P K,et al .Structural,dielectric and ferroelectric properties of multilayer lithium tantalate thin films prepared by sol-gel technique[J].Thin Solid Films,2011,519 |
| [9] | 张德银,黄大贵,李金华,李坤,但迪迪,董政.ITO衬底上LiTaO3薄膜的制备与介电特性[J].红外与毫米波学报,2007(03):170-173. |
| [10] | 潘国峰,何平,孙以材,高金雍.退火温度对纳米TiO2薄膜的乙醇气敏特性的影响[J].材料科学与工程学报,2007(06):965-968. |
| [11] | 孙喜莲,方燕群.退火温度对聚乙二醇改性氧化钨薄膜结构及电致变色性能的影响[J].材料科学与工程学报,2013(02):175-180,190. |
| [12] | 朱晓东,傅永庆,何家文 .离子束增强沉积技术制备MoS2固体润滑膜[J].材料科学与工程,1996,14(1):13~16,1996. |
| [13] | Jacob J,Hartnett J G,Mazierska J,et al.Lithium Tantalate-A High Permittivity Dielectric Material for Microwave Communication Systems'[C].IEEE Conference on Convergent Technologies for the Asia-Pacific Region,2003,1362~1366.,2003. |
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