采用双偏压热丝化学气相沉积法 在不同栅极和衬底 偏流下制备出纳米金刚石薄膜. 采用Raman谱、SEM、AFM、纳米压 痕法和XRD分析纳米金刚石膜的微结构、弹性模量和 残余应力. 分析结果表明，金刚石晶粒尺寸随着栅极和 衬底偏流的增加而减小，而衬底偏流的加入会引起非金刚石成分的显著 增加. 金刚石晶界的畸变使得弹性模量随着栅极和衬底偏流的增加而 减小，薄膜热应力也随之减小. 晶界非金刚石成分引 起金刚石本征应力呈压应力性质，晶界密度的增加使得 本征应力随着栅极偏流的增加而增加，但衬底偏流引起薄膜抵抗变形 能力剧烈下降，导致金刚石本征压应力的减小.
Nanocrystalline diamond film is obtained at the grid and substrate bias current in the self-made double bias HFCVD system. The micro structure of the film is analyzed by Raman, SEM and AFM, and elastic modulus and residual stress are investigated by nano-indentation and XRD method. The results show that the increasing of grid and substrate bias current will cause the decreasing of grain size and the increasing of sp2 non-diamond content in the film. The grid and substrate bias current lead to the decreasing of elastic modulus and thermal stress in the diamond film. The non-diamond impurity induces the compression intrinsic stress in the film. The grid bias current results in the increasing of intrinsic stress as the increasing of grain boundary. But the substrate bias current leads to the weak ability of resistance to deformation as a lot of non-diamond content in the grain boundary, which results in the decreasing of intrinsic stress.
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