铁电钛酸锶钡(BaxSr1-x)TiO3是一种具有十分优越铁电/介电性能的材料,在可调微波器件及动态随机存储器件方面有很好的应用前景.介绍了钛酸锶钡薄膜材料的基本结构、制备技术、掺杂改性等方面的研究现状,并在性能改善的基础上,指出了该材料的未来发展方向.
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