氮化铝(AlN)是一种重要的宽带隙(6.2eV)半导体材料,在高温、高频、大功率电子器件、光电子器件、激光器件等半导体器件中有着良好的应用前景.物理气相传输法( PVT)是制备AlN体单晶最有效的途径之一,目前,美国Crystal IS公司、俄罗斯N-Crystals公司在该领域处于领先地位,可以制备出直径为2inch(5.08cm)的体单晶.为了获得大尺寸、高质量的AlN晶体,需要不断寻找合适的籽晶材料.从最早的SiC籽晶,发展到近年来的AlN籽晶、SiC/AlN复合籽晶,加上不断改进的PVT工艺条件,少数研究机构已经可以获得直径跨度大、缺陷密度低的AlN晶体.近两年,高品质的AlN晶体也已成功应用于紫外LED的研制.
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