湿法腐蚀技术成本低,是硅微机械(Micromachining)加工中最基础、最关键的技术.着重讨论了3种主要湿法技术的优缺点,概述了硅的各向同性存在侧向腐蚀、各向异性受晶格限制以及电化学腐蚀受图形尺寸限制的缺点和局限性,探讨了国内外研究现状和湿法腐蚀技术存在的问题及今后电化学腐蚀技术在湿法技术中的地位.
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