高灵敏Love波传感器及其关键材料

功能材料, 2007, 38(12): 1933-1940.

高灵敏Love波传感器及其关键材料

杜晓松 ^1, , 蒋亚东 ^2, , 杨邦朝 ^3, , 胡佳 ^4, , 应智花 ^5, , 谢光忠 ^6,

1.电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054

2.电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054

3.电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054

4.电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054

5.电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054

6.电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054

基金项目: 国家自然科学基金(60425101)

关键词： Love波传感器 , 波导 , 基板切向 , 灵敏度 , 频率温度系数

High sensitive Love wave chemical sensor and its key materials

Love波传感器是声表面波传感器的一种,其灵敏度最高.对Love波生物、化学传感器的研究现状进行了综述,着重分析了波导材料及其厚度、基板材料及其切向对传感器的灵敏度及温度稳定性的影响关系.指出采用高频谐振型的器件结构并结合聚合物波导的方案可进一步提高Love波传感器的灵敏度.

参考文献

[1]	Velleloop M J .[J].Ultrasonics,1998,36:7.
[2]	McHale G;Newton M I;Martin F .[J].Journal of Applied Physics,2002,91:9701.
[3]	Gizeli E.;Stevenson A.C. .A novel Love-plate acoustic sensor utilizing polymer overlayers[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,1992(5):657-659.
[4]	Josse F;Bender F;Cernosek RW .Guided shear horizontal surface acoustic wave sensors for chemical and biochemical detection in liquids[J].Analytical chemistry,2001(24):5937-5944.
[5]	McHale G;Newton M I;Martin F .[J].Applied Physics Letters,2001,79:3542.
[6]	Rasmusson A;Gizeli E .[J].Journal of Applied Physics,2001,90:5911.
[7]	Turton A;Bhattacharyya D;Wood D .[J].Measurement Science and Technology,2006,17:257.
[8]	Barie N;Stahl U;Rapp M .Mass-sensitive Sensor[P].US 20050011251,2005-6-20.
[9]	Avramov I D;Rapp M;Voigt A.Discrimination of Aliphatic Homologues and Lsomers Using Trap and GC Enhanced SAW based Electronic Noses[A].Exhibition,2000:58.
[10]	Lnge K;Grimm S;Rapp M .[J].Sensors and Actuators B:Chemical,2007,125:441-446.
[11]	Kovacs G;Lubking G W;Vellekoop M J.Love Waves for (bio) Chemical Sensing in Liquids[M].New York,1992:281.
[12]	Du J;Harding G L;Ogilvy J et al.[J].Sensors and Actuators A:Physical,1996,56:211.
[13]	Harding GL;Du J .Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers[J].Smart Materials & Structures,1997(6):716-720.
[14]	Jakoby B;Vellekoop MJ .Properties of Love waves: applications in sensors[J].Smart Materials & Structures,1997(6):668-679.
[15]	Kalantar-Zadeh K;Trinchi A;Wlodarshi W et al.[J].Sensors and Actuators A:Physical,2002,100:135.
[16]	Chu SY.;Water W.;Liaw JT. .An investigation of the dependence of ZnO film on the sensitivity of love mode sensor in ZnO/quartz structure[J].Ultrasonics,2003(2):133-139.
[17]	Water W;Yang YS .The influence of calcium doped ZnO films on Love wave sensor characteristics[J].Sensors and Actuators, A. Physical,2006(2):360-365.
[18]	Moreira F;Hakiki M E;Sarry F et al.[J].IEEE Sensors Journal,2007,7:336.
[19]	Du J.;Harding GL. .A multilayer structure for Love-mode acoustic sensors[J].Sensors and Actuators, A. Physical,1998(2/3):152-159.
[20]	Harding G L .[J].Sensors and Actuators A:Physical,2001,88:20.
[21]	Kalantar-Zadeh K.;Powell DA.;Wlodarski W.;Ippolito S.;Galatsis K. .Comparison of layered based SAW sensors[J].Sensors and Actuators, B. Chemical,2003(1/3):303-308.
[22]	Jakoby B.;Vellekoop MJ. .Substrates for zero temperature coefficient Love wave sensors[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2000(3):701-705.
[23]	Herrmann F;Weihnacht M;Büttgenbach S et al.[J].SPIE,2001,4205:180.
[24]	Chu S Y;Water W .[J].Integrated Ferroelectrics,2003,51:121.
[25]	Soluch W .[J].Electronics Letters,2006,42:77.
[26]	Stevenson A C;Gizeli E;Goddard N J et al.[J].Sensors and Actuators B:Chemical,1993,13:635.
[27]	Jakoby B;Lubking G W;Vellekoop M J .[J].SPIE,1998,3328:213.

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高灵敏Love波传感器及其关键材料

High sensitive Love wave chemical sensor and its key materials

参考文献