采用化学溶液分解法(CSD)在p型Si<100>衬底上制备了(Bi0.8Ce0.2)2Ti2O7薄膜,采用X射线衍射技术研究了薄膜的结构和结晶性.研究表明:Ce3+部分取代Bi3+能够显著提高Bi2Ti2O7薄膜的相稳定性.同时还研究了薄膜的电容-电压特性、介电常数、介电损耗.结果表明,该薄膜具有良好的介电特性.
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