室温下采用射频磁控溅射技术在涤纶纺粘非织造布表面沉积钴铁(CoFe)合金薄膜.通过原子力显微镜(AFM)观察了CoFe合金薄膜在无纺织布表面沉积的微观结构,并较为系统地分析了溅射时间、溅射压强及溅射功率对CoFe合金薄膜微观结构的影响.结果表明,磁控溅射的工艺参数配置对CoFe合金薄膜表面形貌的影响很大,溅射时间的长短、溅射功率的大小对成膜的均匀性有很大影响,在一定的溅射压强(0.5Pa)时合金颗粒将会因团聚而急速增大.
PET spun-bonded nonwoven fabric deposited with CoFe alloy thin films is prepared by RF(radio frequency) magnetron sputtering using CoFe alloy as the target and Ar(argon) as the working gas at room temperature.The mnicrostructures of CoFe alloy thin films deposited on the surface of PET fibers are analyzed by AFM(atomic force microscope).The effects of several RF sputtering parameters,such as sputtering time,sputtering pressure and sputtering power on microstructures of CoFe alloy thin films are investigated.It is shown that the configuration of sputtering parameters makes great influence on the morphology of CoFe alloy thin films.The sputtering time and sputtering power affect the uniformity of the thin films greatly.The size of CoFe alloy nanoparticles increases sharply when sputtering pressure is 0.5Pa because of agglomeration.
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