基于多元素靶溅射的Andersen-Sigmund关系式,在分析了大量的二、三元素合金溅射稳定态靶表面化学成分的变化之后,发现各元素之间表面结合能之比几乎与靶体化学成分无关.只要给各元素之间设定适当的表面结合能比,就可以很容易地计算出三元合金靶稳定态表面化学成分,至少对于用2keV氩离子轰击的Ag-Pd-Au三元合金靶系来说,其计算结果都与实验值一致.所分析的实验数据是在常温下取得的,所以可不考虑离子轰击诱发的Gibbs偏析,其结论很可能是多元合金靶溅射的一般规律.此外,由Galdikas等最近所提出的所谓择优溅射中的"基体效应"理论是无实验依据的.
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