La_(1-x)Sr_xMnO_3电极的制备及其对Ba_(1-x)Sr_xTiO

人工晶体学报, 2010, 39(1): 262-266.

La_(1-x)Sr_xMnO_3电极的制备及其对Ba_(1-x)Sr_xTiO_3薄膜介电性能的影响

辛立强 ^1, , 付兴华 ^2, , 于玲君 ^3, , 崔永涛 ^4,

1.济南大学材料学院,济南,250022

2.济南大学材料学院,济南,250022

3.济南大学材料学院,济南,250022

4.济南大学材料学院,济南,250022

基金项目: 济南大学博士基金

关键词：溶胶-凝胶技术 , La_(1-x)Sr_xMnO_3电极 , Ba_(1-x)Sr_xTiO_3 , 外延生长 , 介电性能

Preparation of La_(1-x)Sr_xMnO_3 Electrode Material and Influence on Dielectric Performance of Ba_(1-x)Sr_xTiO_3 Thin Film

XIN Li-qiang ^1, , FU Xing-hua ^2, , YU Ling-jun ^3, , CUI Yong-tao ^4,

1.济南大学材料学院,济南,250022

2.济南大学材料学院,济南,250022

3.济南大学材料学院,济南,250022

4.济南大学材料学院,济南,250022

Keywords： Sol-gel technology , La_(1-x)Sr_xMnO_3 electrode , Ba_(1-x)Sr_xTiO_3 , epitaxial growth , dielectric property

采用溶胶-凝胶法在Si(100)基底上制备了La_(1-x)Sr_xMnO_3电极材料.采用XRD、SEM对材料的晶体结构、表面形貌、薄膜厚度进行了表征,研究了退火温度对薄膜结构及电阻率的影响,以及介电常数与介电损耗随频率变化的关系.结果表明:在x=0.5,退火温度为800 ℃时,La_(0.5)Sr_(0.5)MnO_3薄膜的电阻率为1.2×10~(-2) Ω·cm.La_(0.5)Sr_(0.5)MnO_3薄膜与Ba_(1-x)Sr_xTiO_3匹配性较好,实现了BST薄膜的外延生长,其介电性能比在Pt上制备的Ba_(1-x)Sr_xTiO_3得到了明显的改善.

参考文献

[1]	Du Yongsheng,Zhang Xuefeng,Yu Dunbo,Yan Hui.Microstructure and Properties of La0.7 Sr0.3 MnO3 Films Deposited on LaAlO3 (100), (110), and (111) Substrates[J].稀土学报（英文版）,2006(05):560-563.
[2]	Jun Miao;Lixin Cao;Jie Yuan;Weiran Chen;Hao Yang;Bo Xu;Xianggang Qiu;Bairu Zhao .Micro structure dependence of the electrical properties of (Ba,Sr)TiO_3 thin film deposited on (La,Sr)MnO_3 conductive layer[J].Journal of Crystal Growth,2005(3/4):498-506.
[3]	吴显明,李润秀,何则强,陈上.采用溶液沉积及快速退火制备LiMn2O4薄膜的研究[J].人工晶体学报,2009(01):221-225,258.

上一张下一张

计量

下载量()
访问量()

作者相关

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

La_(1-x)Sr_xMnO_3电极的制备及其对Ba_(1-x)Sr_xTiO_3薄膜介电性能的影响

Preparation of La_(1-x)Sr_xMnO_3 Electrode Material and Influence on Dielectric Performance of Ba_(1-x)Sr_xTiO_3 Thin Film

参考文献