利用非对称双极脉冲磁控溅射技术在20CrNiMo钢表面制备了TiN／ZrN多层薄膜，利用扫描电子显微镜和原子力显微镜观察了薄膜的截面和表面形貌，用划痕仪测试了薄膜与基体的结合力，通过球一盘摩擦磨损试验机对薄膜的摩擦学性能进行了研究。结果表明：制备的TiN／ZrN多层薄膜厚度约为2．μam，薄膜均匀且致密，表面粗糙度为13．63nm；薄膜与基体结合较牢固，临界载荷达到51．0N；薄膜具有优良的减摩性，摩擦因数为0．16，较基体20CrNiMo钢的0．33明显减小，使该钢的耐磨性能得到提高。
TiN/ZrN multilayer films were deposited on the surface of 20CrNiMo steel by the symmetrical bipolar pulsed reactive magnetron sputtering. The morphology of the films at cross section and the surface morphology were observed by scanning electron microscopy and atomic force microscopy. The adhesion between the films and substrate was measured with the scribe testing. Tribological properties of the films was evaluated on a ball-on-disc friction and wear tester. The results show that the TiN/ZrN multilayer films with 2. 1μm thickness could be obtained, which were uniform and compact. The average surface roughness was about 13.63 nrn. The films had a good adhesion of critical load 51.0 N with the substrate. It was found that the films had excellent antifriction. The friction coefficient of the 20CrNiMo steel was about 0. 33 under dry sliding, while the TiN/ZrN films had lower friction coefficient of 0. 16 under the same testing condition.
参考文献
| [1] | Panjan P.;Cvelbar A.;Zalar A.;Milosev I.;Navinsek B. .OXIDATION OF TIN, ZRN, TIZRN, CRN, TICRN AND TIN/CRN MULTILAYER HARD COATINGS REACTIVELY SPUTTERED AT LOW TEMPERATURE[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1996(1/2):298-301. |
| [2] | P. J. Kelly;R. D. Arnell .Magnetron sputtering: a review of recent developments and applications[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2000(3):159-172. |
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