非晶碳膜中sp2和sp3相的检测方法

材料导报, 2006, 20(6): 98-101.

非晶碳膜中sp2和sp3相的检测方法

鲁占灵 ^1, , 张兵临 ^2, , 姚宁 ^3, , 杨仕娥 ^4, , 樊志琴 ^5,

1.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052;郑州大学材料科学与工程学院,郑州,450052

2.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

3.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

4.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

5.河南工业大学数理系,郑州,450052

基金项目: 教育部科学技术研究项目(205091)

关键词：非晶碳膜 , sp2碳 , sp2碳 , 检测方法

The Characterization Methods Used to Determine sp2 and sp3 Bonding Carbon of Amorphous Carbon Film

非晶碳薄膜由sp2和sp3杂化的碳原子组成.sp2和sp3碳原子的比例是决定非晶碳膜的结构和性能的重要参数.如何定量或定性地分析碳薄膜中sp2和sp3碳的含量一直是十分重要的问题.目前用来测定sp2和sp3碳及其比例的实验方法有13C核磁共振谱(NMR)、电子能量损失谱(EELS)、X射线光电子能谱(XPS)、椭圆偏振谱、拉曼光谱(Raman)、红外光谱(IR)等.综述了这些测定方法及其特点.

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非晶碳膜中sp2和sp3相的检测方法

The Characterization Methods Used to Determine sp2 and sp3 Bonding Carbon of Amorphous Carbon Film

参考文献