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研究了不同烧结温度对Pb(Mn1/3Sb2/3)O3-PbZrO3-PbTiO3(PMS-PZT)系压电陶瓷显微结构和压电性能的影响.实验结果表明:在1240℃、2h条件下烧结,能获得最优的综合性能:εr=1530、d33=374、Kp=0.6、tanδ=0.41%、Qm=1250,可以满足压电变压器和超声马达等大功率场合下的使用要求.与此同时,当烧结温度为1100-1150℃时,材料仍然具有良好的压电性能:εr=1370、d33=348、Kp=0.57、tanδ=0.62%、Qm=1620(1150℃),因此可以作为中低温烧结的多层器件用厚膜材料.高温显微镜、SEM、TEM和EDS等研究表明,PMS-PZT系陶瓷具有很宽的烧结温度区域,特别是中低温烧结时仍能成瓷并具有高的压电性能,主要是因为PbO和Sb2O5在较低烧结温度下(1100℃)能够形成过渡液相促进陶瓷烧结,随着烧结温度的升高,它们能够重新进入晶格形成单一钙钛矿结构.

The effects of sintering temperature on the microstructure and piezoelectric properties of
Pb(Mn1/3Sb2/3)O3-PbZrO3-PbTiO3 (PMS-PZT) ceramic were investigated. Results show that the optimized properties of εr=1530,
d33=374pC/N, Kp=0.6, tanδ=0.41%, Qm=1250 can be obtained when the ceramic sintered at 1240℃ for 2h, which suit for high-power applications. Meanwhile, the ceramic also possesses
superior characteristics (εr=1370, d33=348pC/N, Kp=0.57, tanδ=0.62% and Qm=1620) for multilayer components and thick-film devices when it sintered at 1150℃.
Results also indicate that PMS-PZT ceramic can be sintered in a wide temperature range. High temperature microscope, SEM, TEM, and EDS
investigation confirm that PbO and Sb_2O_5 can form a liquid phase acting as a secondary phase on grain boundaries at lower sintering
temperature, and then enter the crystal lattice to form perovskite structure at higher sintering temperature.

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