化学气相沉积(CVD)金刚石膜具有极其优异的电学(电子学)、光学、热学、力学、声学和电化学性能的组合,因此在一系列高新技术领域有非常好的应用前景,并曾在20世纪80年代中期形成席卷全球的"金刚石热".30余年来, CVD金刚石膜研究取得了极其巨大的进展,但在产业化应用方面仍不尽人意.本文对此进行了比较详尽地综述和评论,希望更多的人了解,并推进其研究和产业化进展.
CVD diamond film is potentially a very promising material in a series of high technology application fields because of the combination of its excellent electrical, thermal, optical, mechanical, acoustic and electrochemical properties, by which the well-known "Diamond Fever" was induced all over the world in the mid 80s of the 20~(th) century. Although great progress in R&D of CVD diamond films was been achieved in the past 30 years, however, the market size are still not so big as expected. In the present paper the progress in the R&D as well as the commercialization of CVD diamond films is reviewed in detail, in the hope that more and more people will understand, and so as to push forward the process to realize the large scale market applications.
参考文献
| [1] | Novikov N V .Synthesis of superhard materials[J].Journal of Materials Processing Technology,2005,161(1 -2):169-1172. |
| [2] | Koji Kobashi;Yoshiki Nishibayashi;Yoshihiro Yokota;Yutaka Ando;Takeshi Tachibana;Nobuyuki Kawakami;Kazushi Hayashi;Kenichi Inoue;Kiichi Meguro;Hiroshi Imai;Hiroshi Furuta;Takashi Hirao;Kenjiro Oura;Yasuhito Gotoh;Hironori Nakahara;Hiroshi Tsuji;Junzo Ishikawa;Franz A.Koeck;Robert J.Nemanich;Tadashi Sakai;Naoshi Sakuma;Hiroaki Yoshida .R & D of diamond films in the frontier carbon technology project and related topics[J].Diamond and Related Materials,2003(3/7):233-240. |
| [3] | Paul May W.Diamond thin films:a 21st-century material[J].Philosophical Transactions of the Royal Society of London Series A Mathematical and Physical Sciences,2000(358):473-4495. |
| [4] | Pehrsson P E;Celii F G;Butler J E.In Diamond Films and Coatings[M].Park Ridge:Noves Publications,NJ,1993:68. |
| [5] | Goodwin D G;Butler J E.In Hand Book of Industrial Diamonds and Diamond Films[M].New York:Marcer Dekker,1998:527. |
| [6] | Butler J E;Windischmann H.Developments in CVD-diamond synthesis during the past decade[J].MRS Bulletin,1998(09):22-227. |
| [7] | 吕反修,宋建华,唐伟忠,黑立富.金刚石膜涂层硬质合金工具研究进展及产业化前景[J].热处理,2008(01):2-11. |
| [8] | Inspektor A .Theory and practice in diamond coated metal cutting tools[J].Metal Powder Report,1997,52(10):38. |
| [9] | Oles E J;Inspektor A;Bauer C E.The new diamond-coated carbide cutting tools[J].Diamond and Related Materials,1996(05):617-6624. |
| [10] | Patrick J. Heaney;Anirudha V. Sumant;Christopher D. Torres .Diamond coatings for micro end mills: Enabling the dry machining of aluminum at the micro-scale[J].Diamond and Related Materials,2008(3):223-233. |
| [11] | CSJ Pickles;TD Madgwick .Optical applications of CVD diamond[J].Industrial Diamond Review,2000(587):293,295,297-299-0. |
| [12] | Claude A Klein.CVD diamond for optics applications in high heat flux environments[A].,1996:34-352. |
| [13] | Gorisek A;Cindro I V;Adams W et al.Status of the R&D activity on diamond particle detectors[J].Nuclear Instruments and Methods in Physics Research A:Accelerators,Spectrometers,Detectors and Associated Equipment,2003,511:124-1131. |
| [14] | LU F X;TANG W Z;LI C M.Deposition,fabrication and application of large area optical grade freestanding diamond films[A].Taiyuan Technology University Press,2005 |
| [15] | Gray K.J. .Free-standing CVD diamond wafers for thermal management by d.c. arc jet technology[J].Diamond and Related Materials,1999(2 Mar):903-908. |
| [16] | Sussmann R S;Brandon J R;Coe S E et al.CVD diamond:a new engineering material for thermal,dielectric and optical applications[J].Industrial Diamond Review,1998,58(578):69. |
| [17] | McDonald Jo Ann .Diamonds hit the big time[J].Ⅲ-Ⅴs REVIEW,1993,6(04):34-337. |
| [18] | Gail Purvis .Diamond still at the edge[J].III-Vs review,2005(8):37-39. |
| [19] | Taylor P D;Chamund D J;Carraway A .Applications of high voltage power semiconductor devices:potential for diamond electronics[J].Industrial Diamond Review,2006,2:19-122. |
| [20] | Fischer M;Gsell S;Schreck M et al.Preparation of 4-inch Ir/YSZ/Si(001) aubstrates for the large-area deposition of single-crystal diamond[J].Diamond and Related Materials,2008,17:1035-11038. |
| [21] | Aleksov A;Kubovic M;Kaeb N et al.Diamond field effect transistors-concepts and challeages[J].Diamond and Related Materials,2003,12:391-3398. |
| [22] | Williams O A;Nesladek M;Daencn M et al.Growth,electronic properties and applications of nanodiamond[J].Diamond and Related Materials,2008,17:1080-11088. |
| [23] | O.A. Williams;M. Daenen;J. D'Haen .Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond[J].Diamond and Related Materials,2006(4/8):654-658. |
| [24] | Gruen D M .Nanocrystalline diamond flims[J].Annual Review of Materials Science,1999,29:211-2259. |
| [25] | Kloss F R;Francis L A;Sternschulte H et al.Commercial developments of nano-crystalline diamond-Two prototypes as case studies[J].Diamond and Related Materials,2008,17:1089-11099. |
| [26] | Puneet Khanna;Alejandro Villagra;Sangchae Kim et al.Use of nanocrystalline diamond for microfluidic lab-on-a-chip[J].Diamond and Related Materials,2006,15:2073-22077. |
| [27] | Panizza M;Cerisola G .A critical review:Application of diamond electrodes to electrochemical processes[J].Electrochimica Acta,2005,51:191-1199. |
| [28] | Matt Hupert;Alexander Muck;Jian Wang;Jason Stotter;Zuzana Cvackova;Shannon Haymond;Yoshiyuki Show;Greg M.Swain .Conductive diamond thin-films in electrochemistry[J].Diamond and Related Materials,2003(10/11):1940-1949. |
| [29] | 魏俊俊 .钛基掺硼金刚石薄膜电极（Ti/BDD）的制备及其废水处理的研究[D].北京科技大学,2008. |
| [30] | Pei Sann Siew;Kian Ping Loh;Wei Choong Poh et al.Biosensing properties of nanocrystaUine diamond film grown on polycrystalline diamond electrodes[J].Diamond and Related Materials,2005,14:426-4431. |
| [31] | Adamschik M;Hinz M;Maier C et al.Diamond micro system for bio-chemistry[J].Diamond and Related Materials,2001,10:722-7730. |
| [32] | Qi Liang;Chih-shiue Yan;Yufei Meng .Recent advances in high-growth rate single-crystal CVD diamond[J].Diamond and Related Materials,2009(5/8):698-703. |
| [33] | Mokuno Y;Chayahara A;Yamada H .Synthesis of large single crystal diamond plates by high rate homoepitsxial growth using microwave plasma CVD and lift-off process[J].Diamond and Related Materials,2008,17:415-418. |
| [34] | Mokuno Y;Chayahara A;Soda Y et al.Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD[J].Diamond and Related Materials,2005,14:1743-11746. |
| [35] | Y. Mokuno;A. Chayahara;H. Yamada .Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation[J].Diamond and Related Materials,2009(10):1258-1261. |
| [36] | Diamond,diamond-like and CBN films & coating products[Technical Report,No.AVM025F][R].,2007. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%