Sol-gel based soft lithography technique has been developed to pattern a variety of ferroelectric Pb(Zr0:52Ti0:48)O3 (PZT) microstructures, with feature size approaching 180 nm and good pattern transfer between the master mold and patterned films. X-ray diffraction and high-resolution transmission electron microscopy confirm the perovskite structure of the patterned PZT. Piezoresponse force microscopy (PFM) and switching spectroscopy piezoresponse force microscopy (SSPFM) confirm their piezoelectricity and ferroelec-
tricity. Piezoresponse as high as 2.75 nm has been observed, comparable to typical PZT films. The patterned PZT microstructures are promising for a wide range of device applications.
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