透明导电氧化物(TCO)是一种特色鲜明的功能材料,以其接近金属的电导率、可见光高透射率、红外区高反射率及其它半导体特性,可应用于平板显示器件、太阳能光伏电池、反射热镜、气体敏感器件、特殊功能窗口涂层以及光电子、微电子、真空电子器件等领域.综述了透明导电氧化物薄膜的基本特性、制备方法及应用,并展望了其发展前景.
参考文献
| [1] | Hass G;Francombe M H;Hoffman R H.Physics of thin films[M].New York:Academic Press,1977 |
| [2] | Promier R;Cril C;Maruchi J .Sprayed films of indium tin oxide and fluorine-doped tin oxide of large surface area[J].Thin Solid Films,1981,77:91. |
| [3] | Ma Honglei;Zhang Deheng.Large-scale fluorine-doped textured transparent conducting SnO2 films deposited by APCVD[A].,1996:104. |
| [4] | S. Shanthi;C. Subramanian;P. Ramasamy .Growth and characterization of antimony doped tin oxide thin films[J].Journal of Crystal Growth,1999(4):858-864. |
| [5] | Lewis B L;Paine D C .Applications and prosessing of transparent conducing xides[J].MRS Bulletin,2000,25(08):22. |
| [6] | 王敏,蒙继龙.透明导电氧化物薄膜的研究进展[J].表面技术,2003(01):5-7. |
| [7] | Kim KH.;Ma DY.;Park KC. .STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ALUMINUM DOPED ZINC OXIDE FILMS PREPARED BY RADIO FREQUENCY MAGNETRON SPUTTERING[J].Journal of Applied Physics,1997(12):7764-7772. |
| [8] | 孟扬,沈杰,蒋益明,陈佾,孔令柱,沃松涛,杨锡良,陈华仙,章壮健.透明导电氧化物薄膜的新进展[J].光电子技术,2002(03):125-130,144. |
| [9] | Palmer G B;Poeppelmeier K R;Mason T O .Conductivity and transparency of ZnO/SnO2-cosubstiuted In2O3[J].Chemistry of Materials,1997,9(12):3121. |
| [10] | Coutts T J;Wu X;Mulligan W P.High performance transparent conducting films of cadmium indate prepared by RF sputtering[A].,1996:479. |
| [11] | Minami T.;Takata S.;Kakumu T.;Takeda Y. .PREPARATION OF TRANSPARENT CONDUCTING IN4SN3O12 THIN FILMS BY DC MAGNETRON SPUTTERING[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(0):13-18. |
| [12] | Hiroshi Yanagi;Shin-ichiro Inoue;Kazushige Ueda .Electronic structure and optoelectronic properties of transparent p-type conducting CuAlO_(2)[J].Journal of Applied Physics,2000(7):4159-4163. |
| [13] | Ueda K.;Yanagi H.;Kawazoe H.;Hosono H.;Ohta H.;Orita M. Hirano M.;Hase T. .Epitaxial growth of transparent p-type conducting CuGaO2 thin films on sapphire (001) substrates by pulsed laser deposition[J].Journal of Applied Physics,2001(3):1790-1793. |
| [14] | 姜健.ZnO∶Al薄膜的制备和工艺参数对其电阻率的影响[J].真空,2000(06):24. |
| [15] | Bae SH.;Kim HY.;Im S.;Lee SY. .Comparison of the optical properties of ZnO thin films grown on various substrates by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(1/4):332-334. |
| [16] | Joseph M.;Saeki H.;Ueda K.;Kawai T.;Tabata H. .Fabrication of the low-resistive p-type ZnO by codoping method[J].Physica, B. Condensed Matter,2001(0):140-148. |
| [17] | Mukherjee P.;Witanachchi S.;Cuff JB. .Plume expansion and stoichiometry in the growth of multi-component thin films using dual-laser ablation[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1998(0):620-625. |
| [18] | 胡少六,江超,龙华,王又青.AZO薄膜双靶PLD沉积及其光学性能分析[J].压电与声光,2004(02):119-121. |
| [19] | Tang W;Camerond C .Aluminum-doped zinc oxide transparent conductors deposited by the sol-gel process[J].Thin Solid Films,1994,238:83. |
| [20] | Ramakrishna Reddy K T .Highly oriented and conducting ZnO:Ca layers grown by chemical spray pyrolysis[J].Surface and Coatings Technology,2002,3:110. |
| [21] | Szanyi J. .The origin of haze in CVD tin oxide thin films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(3/4):161-171. |
| [22] | Schuler T;Aegerter M A .Optical,electrical and structural properties of Sol-Gel ZnO:Al coatings[J].Thin Solid Films,1999,351:125. |
| [23] | Fan Zhixin .Liquid crystal devices faces brilliant prospects[J].Journal of Physics,2000,29(11):688. |
| [24] | Hu Yunhui;Li jingzeng;Yu Shengfa.Rolling coating technology of high transparent and low square resistance[J].Vacuum Technology and Application,2001(02):36. |
| [25] | 吕建国,汪雷,叶志镇,赵炳辉.ZnO薄膜应用的最新研究进展[J].功能材料与器件学报,2002(03):303-308. |
| [26] | 李世涛,乔学亮,陈建国.透明导电薄膜的研究现状及应用[J].激光与光电子学进展,2003(07):53-59. |
| [27] | 钟毅;王达键;刘荣佩 等.铟锡氧化物(ITO)靶材的应用和制备技术[J].昆明理工大学学报（理工版）,1997,22(01):66. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%