以ZnAl2O4陶瓷靶为靶材,采用射频磁控溅射法制备了掺铝氧化锌(ZAO)透明导电薄膜,通过XRD、SEM、四探针仪和分光光度计等测试,研究了沉积温度对薄膜结构、形貌、力学和光电性能的影响.结果表明:ZAO具有(002)择优取向的六角纤锌矿结构,沉积温度对薄膜性能具有明显影响,当温度位于370～ 400℃区间时,薄膜的结晶质量较好、电阻率较低、可见光波段的平均透射率较高,其品质因数大于1.20×10-2S,具有良好的光电综合性能.同时基于透射光谱计算了ZAO薄膜的光学常数,并用有效单振子理论解释了薄膜的折射率色散关系.
参考文献
| [1] | Wang, L.;Swensen, J.S.;Polikarpov, E.;Matson, D.W.;Bonham, C.C.;Bennett, W.;Gaspar, D.J.;Padmaperuma, A.B. .Highly efficient blue organic light-emitting devices with indium-free transparent anode on flexible substrates[J].Organic electronics,2010(9):1555-1560. |
| [2] | 李方馨,孟庆蕾,席曦,钱维莹,阙立志,王振交,季静佳,丁玉强,顾晓峰,李果华.阳极修饰层ZnPc对OLED性能影响的研究[J].人工晶体学报,2009(03):721-726. |
| [3] | 李襄宏,唐定国.基于1,10-邻菲罗啉衍生物的两亲性钌配合物的合成及其光电转化性质[J].中南民族大学学报（自然科学版）,2009(03):9-13. |
| [4] | Mitsubayashi K.;Wakabayashi Y.;Tanimoto S.;Murotomi D.;Endo T. .Optical-transparent and flexible glucose sensor with ITO electrode[J].Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices,2003(1):67-71. |
| [5] | 陈首部,韦世良,何翔,孙奉娄.改性方法对氧化铟锡衬底表面形貌和化学组分的影响[J].中南民族大学学报（自然科学版）,2009(04):43-46. |
| [6] | 杨少鹏,邱晓丽,赵方超,秦向东,庞学霞,傅广生.ZnO掺杂对PVK∶Ir（ppy）3体系发光特性的影响[J].人工晶体学报,2009(02):317-320. |
| [7] | 钟志有.有机LED器件结构对其内部电场和电荷分布的影响[J].中南民族大学学报（自然科学版）,2009(03):73-78. |
| [8] | 任明放,王华,许积文,杨玲.热处理工艺对室温制备ZnO：Al薄膜结构与光电性能的影响[J].人工晶体学报,2009(05):1189-1192,1198. |
| [9] | Kim H.;Horwitz JS.;Murata H.;Kafafi ZH.;Gilmore CM.;Chrisey DB.;Pique A. .Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):798-802. |
| [10] | Hao X;Ma J;Zhang D et al.Thickness Dependence of Suuctural,Optical and Electrical Properties of ZnO∶ Al Films Prepared on Flexible Substrates[J].Applied Surface Science,2002,189(01):18-23. |
| [11] | 刘凯,赵小如,赵亮,姜亚军,南瑞华,魏炳波.pH值对溶胶-凝胶法制备的掺铝氧化锌薄膜光电性能的影响[J].人工晶体学报,2009(03):585-590,596. |
| [12] | 李微,孙云,何青,刘芳芳,李凤岩.孪生对靶直流磁控溅射制备ZnO：Al薄膜及其特性研究[J].人工晶体学报,2006(04):761-764,815. |
| [13] | 陈栋华,李秋霞,黄佳平.一种新型的蓝光激发白光LED用荧光粉Ba0.5Sr0.5MoO4∶0.02Pr3+[J].中南民族大学学报（自然科学版）,2010(03):14-17. |
| [14] | Quan-Bao Ma;Zhi-Zhen Ye;Hai-Ping He;Shao-Hua Hu;Jing-Rui Wang;Li-Ping Zhu;Yin-Zhu Zhang;Bing-Hui Zhao .Structural, electrical, and optical properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering[J].Journal of Crystal Growth,2007(1):64-68. |
| [15] | Stress and structural studies of ZnO thin films on polymer substrate under different RF powered conditions[J].Materials Letters,2009(29):2597. |
| [16] | Ohring M.The Materials Science of Thin Films[M].San Diego,Academic Press Inc,1992 |
| [17] | 顾锦华,钟志有,何翔,孙奉娄.真空退火处理对光敏薄膜及聚合物太阳电池性能的影响[J].中南民族大学学报（自然科学版）,2009(03):30-33,57. |
| [18] | You ZZ;Hua GJ .Refractive index, optical bandgap and oscillator parameters of organic films deposited by vacuum evaporation technique[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2009(6):984-988. |
| [19] | 李襄宏,唐定国.基于1,10-邻菲罗啉衍生物的两亲性钌配合物的合成及其光电转化性质[J].中南民族大学学报（自然科学版）,2009(03):9-13. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%