为了改善SSiC陶瓷反射率较低的情况,采用RF磁控溅射法在SSiC陶瓷表面涂覆了无定型Si-C-O-N涂层.借助XRD、FTIR、XPS等手段对涂层进行了表征,并在可见光波长范围内测量了涂层的反射率.结果显示:涂层主要由Si-N、Si-C和Si-O键组成,涂层抛光后其表面缺陷明显减少,表面粗糙度可达埃级,在可见光波段可将反射率的最低值提升至90%.并运用标量散射理论分析了反射率提高的主要原因.
In order to improve the low reflectance of polished SSiC, the amorphous Si-C-O-N coating was coated on the surface of SSiC ceramics by RF magnetron sputtering. The as-prepared coating was characterized by XRD, FTIR and XPS, et al. The reflectance was also determined in the visible range. The results show that the coating was composed of Si-N, Si-C and Si-O bondings. The surface defects decrease obviously after polished. The surface roughness yields to angstrom grade. The lowest reflectance in visible range increases to 90%. The scalar scattering theory was used to analyze the cause in increasing the reflectance.
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