薄膜导热系数的测量方法及技术

功能材料, 2010, 41(5): 870-877.

薄膜导热系数的测量方法及技术

王伟伟 ^1, , 张敏 ^2, , 李凌智 ^3, , 柳清菊 ^4,

1.云南大学,云南省高校纳米材料与技术重点实验室,云南,昆明,650091

2.云南大学,云南省高校纳米材料与技术重点实验室,云南,昆明,650091

3.云南大学,云南省高校纳米材料与技术重点实验室,云南,昆明,650091

4.云南大学,云南省高校纳米材料与技术重点实验室,云南,昆明,650091

基金项目: 云南省应用基础研究计划重点资助项目(2006E0001Z)

关键词：薄膜 , 导热系数 , 测量

Measurement methods and technology of thin-film thermal conductivity

随着微型机电系统及集成电路的发展,器件中大量使用了微米、纳米量级厚度的薄膜,对其导热系数测量的研究有助于器件的设计和热优化工作.综述了当前几种测量薄膜导热系数的主要方法及技术,分析了各自的优点及不足,并对其以后的发展趋势做了简要分析.

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薄膜导热系数的测量方法及技术

Measurement methods and technology of thin-film thermal conductivity

参考文献