CO2激光对熔石英损伤修复的机理主要是通过激光的热效应使表面发生熔融,对损伤处起到弥合作用使元件的表面结构趋于完整.近几年CO2激光修复的方法按激光扫描方式可以分为光栅式扫描法和振镜扫描法.利用逐渐提高功率的扫描方式可以有效减少修复过程中气泡的产生,用高温退火的方式可以完全消除或者消除大部分修复后产生的应力,这取决于损伤点的尺寸.多种处理工艺相结合的方法可以有效提高修复后的损伤阈值.
参考文献
| [1] | Edward I. Moses .The national ignition facility high-energy ultraviolet laser system[J].Optical materials,2004(4):515-521. |
| [2] | Rubenchik A M;Feit M D .Initiation,growth and mitigation of UV laser induced damage in fused silica[J].PROCEEDINGS OF THE SPIE,2001,4679:79. |
| [3] | 孙承伟.激光辐照效应[M].北京:国防工业出版社,2002 |
| [4] | Brusasco R M;Penetrate B M;Peterson J E et al.CC2-laser polishing for reduction of 351nm surface damage initiation in fused silica[R].Livemore National Laboratory Report,2001. |
| [5] | Brusasco R M;Penetrante B M;Butler J A.Localized CO2 laser treatment for mitigation of 3ω damage growth in fused silica[A].,2002 |
| [6] | Mendez E;Nowak K M;Baker H J et al.Localized CO2 laser damage repair of fused silica optics[J].Applied Optics,2006,45:5358. |
| [7] | Hrubesh L W;Norton M A;Molander W A et al.Methods for mitigating growth of laser-initiated surface damage on fused silica optics at 351nm[R].Livemore National Laboratory Report,2001. |
| [8] | Kozlowski M;Demos S;Wu Z L et al.3ω Damage:Growth mitigation[R].Livemore National Laboratory Report,2001. |
| [9] | Bouchut P;Delrive L;Decruppe D et al.Local refusion of silica,by a continuous CO2 laser,for the mitigation of laser damage growth[J].Opt Fabrication Test Metrology,2004,5252:122. |
| [10] | Izawa T;Shibata N;Takeda A .Optical attenuation in pure and doped fused silica in their wavelength region[J].Applied Physics Letters,1977,31(01):33. |
| [11] | Andrei M Efimov;Vera G Pogareva .IR absorption spectra of vitreous silica and silicate glasses:The nature of bands in the 1300 to 5000 cm-1 region[J].Chemical Geology,2006,229:198. |
| [12] | Isaac L Bass;Gabriel M Guss;Hackel Richardp .Mitigation of laser damage growth in fused silica with a galvanometer scanned CO2 Laser[J].International Society for Optical Engineering,2005,5591:1. |
| [13] | Gabe Guss;Isaac Bass;Vaughn Draggoo et al.Mitigation of growth of laser initiated surface damage in fused silica using a 4.6μm wavelength laser[J].International Society for Optical Engineering,2007,6403:1. |
| [14] | Feit M D;Rubenchik A M .Influence of subsurface cracks on laser induced surface damage[R].Lawrence Livermore National Laboratory,2003. |
| [15] | Krol H;Gallais L;Natoli J Y et al.Investigation of nanoprecursors threshold distribution in laser-damage testing[J].Optics Communications,2005,256:184. |
| [16] | 段晓峰,汪岳峰,牛燕雄,张雏.激光辐照光学材料热力效应的解析计算和损伤评估[J].中国激光,2004(12):1455-1459. |
| [17] | 段晓峰,牛燕雄,张雏.半导体材料的激光辐照效应计算和损伤阈值分析[J].光学学报,2004(08):1057-1061. |
| [18] | Guignard F;Autric M;Baudinaud V.Temperature and residual stress evolution in CO2 laser irradiated glass[A].,1998 |
| [19] | Paul A Temple;Howard Lowdermilk W;Milam D .Carbon dioxide laser polishing of fused silica surfaces for increased laser-damage resistance at 1064nm[J].Applied Optics,1982,21(18):3249. |
| [20] | Laurent Gallais;Philippe Cormont;Jean-Luc Rullier .Investigation of stress induced by CO2 laser processing of fused silica optics for laser damage growth mitigation[J].Optics Express,2009,17(26):23488. |
| [21] | Xiao Y M;Michael Bass .Thermal stress limitations to laser fire polishing of glasses[J].Applied Optics,1983,22(18):2933. |
| [22] | 黄进,赵松楠,王海军,吕海兵,叶琳,蒋晓东,袁晓东,郑万国.熔石英表面缺陷的CO2激光局部修复技术[J].中国激光,2009(05):1282-1286. |
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