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为了了解旋转对邱克拉斯基(Czochralski)晶体生长结构液池内熔体流动的影响,利用有限差分法进行了三维非稳态数值模拟,坩埚外半径为50 mm,晶体半径为15 mm,液池深度为50 mm.结果表明,当旋转速度较低时,流动为稳态轴对称流动,随着转速的提高,流动会转化为三维非稳态振荡流动;晶体与坩埚同向旋转时,流动转化的临界转速较高,反向旋转时,临界转速较低;晶体单独旋转时,速度波周向速度远小于晶体旋转速度,坩埚单独旋转时,速度波周向速度与坩埚旋转速度保持一致;坩埚转速越快,速度波动幅度和波数越小.

参考文献

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