以正硅酸乙酯为前驱体,通过溶胶-凝胶法,采用多分离层镀膜工艺制备了用于分离CH4/CO2气体二氧化硅无机膜.通过TG-DSC、粒度分析仪及SEM对二氧化硅膜进行表征,结果表明分别利用HNO3、EtOH及DMF作为催化剂、助溶剂及添加剂可制备出表面性能较好的二氧化硅膜；利用多分离层镀膜工艺制备的二氧化硅膜,在0.025MPa下,对CH4/CO2气体的分离因子高达1.73,其效果明显高于利用单一溶胶涂膜的分离因子1.6,有效的提高了二氧化硅膜对气体的分离能力.
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