以乙酰丙酮锌、乙酰丙酮铝为锌和铝的原料,乙醇和水为溶剂,采用超声喷雾热解法在玻璃衬底上制备了ZnO∶Al透明导电薄膜,研究了Al添加量为0％～20％(原子分数,下同)对ZnO∶Al薄膜光电性能的影响.使用XRD、SEM、DSC、FTIR、四探针、分光光度计对薄膜进行了表征和分析.结果表明,300℃的低温能生长出结晶态的薄膜,Al掺杂引起晶格常数减小;晶粒形貌为片状;随着Al添加量的增加,方块电阻先降低后增大,Al添加量为4.0％时具有最低的方块电阻(4.43 kΩ/sq),最佳的电阻率(0.43 Ω·cm);Al添加量对薄膜的透光率影响较小,平均可见光透光率大于80％.真空热处理可显著降低方块电阻,Al添加量为4.0％的薄膜经过550℃热处理后,其方块电阻降低到106 Ω/sq,相应的电阻率为1.0×10-2 Ω·cm.
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