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Sm and Gd co-doped Ceria (SGDC: Sm0.1Gd0.1Ce0.8O1.90) films as the electrolytes were investigated for the IT-SOFCs (intermediate-temperature solid oxide fuel cells). SGDC sensing films were successfully prepared on the Al2O3 substrates by RF-magnetron sputtering. The relationship between sputtering parameters and film microstructure was discussed,and the optimum parameters were gained. The crystal structure analysis and surface morphologic observation of the SGDC films were carried out through X-ray diffraction (XRD) and scanning electron microscopy (SEM). The oxygen ion conductivity of the SGDC film was evaluated by AC impedance spectroscopy at the different temperatures. The XRD analysis shows that the SGDC films grow preferentially along the (111) compact plane. The crystallinity of the SGDC films is enhanced with the increase of the RF sputtering power from 150 W to 250 W. The oxygen ion conductivity of the SGDC was measured at the temperature from 600℃ to 800℃ in air by AC impedance spectroscopy. The result shows that a high oxygen ion conductivity of 2.44× 10-2 S.cm-1 was achieved at 800℃.

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