采用电子束蒸发法成功制备了透明导电的ZnO/Mo/ZnO(ZMZ)复合薄膜,研究了不同的退火温度对其电学和光学性质的影响规律.利用X射线衍射仪、扫描电子显微镜、X射线能谱仪、紫外可见分光光度计和四探针测试仪等检测手段对样品的性能进行了分析.实验结果表明:随着退火温度的升高,薄膜的结晶程度提高,晶粒尺寸增大;薄膜的电阻率先降低后升高;薄膜的光学透过率先升高后降低.当退火温度为250℃时,ZnO/Mo/ZnO薄膜具有最佳的综合光电性能,在400nm～900nm波长范围内最高透过率为81.4％,平均透过率高于80％,最低电阻率为1.71×10-4Ω·cm,表面电阻为15.5Ω/sq.研究表明所制备的ZMZ复合透明导电薄膜可应用于太阳能电池、液晶显示器等领域.
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