SiGe/Si异质结光电器件

材料导报, 2006, 20(1): 116-119.

SiGe/Si异质结光电器件

刘国军 ^1, , 叶志镇 ^2, , 吴贵斌 ^3, , 孙伟峰 ^4, , 赵星 ^5, , 赵炳辉 ^6,

1.浙江大学硅材料国家重点实验室,杭州,310027

2.浙江大学硅材料国家重点实验室,杭州,310027

3.浙江大学硅材料国家重点实验室,杭州,310027

4.浙江大学硅材料国家重点实验室,杭州,310027

5.浙江大学硅材料国家重点实验室,杭州,310027

6.浙江大学硅材料国家重点实验室,杭州,310027

基金项目: 浙江省资助项目(981101040;991110535) 国家攀登计划

关键词： SiGe/Si异质结 , 光电器件 , 光电集成

SiGe/Si Heterostructure Optoelectronic Devices

SiGe/Si异质结光电器件及其光电集成(OEIC)是硅基光电研究的一个非常引人注目的领域.综述了SiGe/Si异质结材料的基本性质,SiGe/Si异质结光电器件的结构、性能、应用及其光电集成.重点介绍了SiGe/Si光电探测器及其与其他相关器件的集成.

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SiGe/Si异质结光电器件

SiGe/Si Heterostructure Optoelectronic Devices

参考文献