采用电化学方法,以分析纯的异丙醇溶液作为碳源,低温(60~70℃)常压条件下,在(100)硅片上沉积了类金刚石薄膜.利用扫描电子显微镜( SEM)、原子力显微镜(AFM)、拉曼光谱仪(Raman)和傅里叶变换红外光谱仪(FTIR)表征了薄膜的表面形貌和结构.结果表明,电解异丙醇溶液可以获得表面均匀致密且sp3碳含量较高的含氢类金刚石薄膜.
参考文献
[1] | Robertson J. .Diamond-like amorphous carbon [Review][J].Materials Science & Engineering, R. Reports: A Review Journal,2002(4/6):129-281. |
[2] | Lifshitz Y .Diamond-like carbon-Present status[J].Diamond and Related Materials,1999,8(8-9):1659. |
[3] | Cuomo J J;Doyle J P;Bruley J et al.Sputter deposition of dense diamond-like carbon films at low temperature[J].Applied Physics Letters,1991,58:466. |
[4] | Zarrabian M;Fourches-Coulon N;Turban G et al.Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma[J].Applied Physics Letters,1997,70(19):2535. |
[5] | Namba Y .Attempt to grow diamond phase carbon films from an organic solution[J].Journal of Vacuum Science and Technology A:Vacuum Surfaces and Films,1992,10(05):3368. |
[6] | Novikov V P;Dymont V P .Synthesis of diamondlike films by an electrochemical method at atmospheric pressure and low temperature[J].Applied Physics Letters,1997,70(02):200. |
[7] | Sun Z. .Investigation of phases in the carbon films deposited by electrolysis of ethanol liquid phase using Raman scattering[J].Chemical Physics Letters,2000(4-5):471-475. |
[8] | Dong Guo;Kai Cai;Long-tu Li;Yog Huang;Zhi-lun Gui .Evaluation of diamond-like carbon films electrodeposited on an Alsubstrate from the liquid phase with pulse-modulated power[J].Carbon: An International Journal Sponsored by the American Carbon Society,2001(9):1395-1398. |
[9] | Robertson J .Hard amorphous (diamond-like) carbons[J].Solid-State Chemistry,1991,21(04):199. |
[10] | Ferrari A C;Robertson J .Interpretation of Raman spectra of disordered and amorphous carbon[J].Physical Review B:Condensed Matter,2000,61(20):14095. |
[11] | Gert Irmer;Annett Dorner-Reisel .Micro-Raman Studies on DLC Coatings[J].Advanced Engineering Materials,2005(8):694-705. |
[12] | Zhu HS.;Jiu JT.;Fu Q.;Wang H.;Cao CB. .Aroused problems in the deposition of diamond-like carbon films by using the liquid phase electrodeposition technique[J].Journal of Materials Science,2003(1):141-145. |
[13] | Robertson J .Recombination and photoluminescence mechanism in hydrogenated amorphous carbon[J].Physical Review B:Condensed Matter,1996,53(24):16302. |
[14] | Casiraghi C;Ferrari AC;Robertson J .Raman spectroscopy of hydrogenated amorphous carbons[J].Physical review, B. Condensed matter and materials physics,2005(8):5401-1-5401-14-0. |
[15] | Ristein J.;Ley L.;Beyer W.;Stief RT. .A comparative analysis of a-C : H by infrared spectroscopy and mass selected thermal effusion[J].Journal of Applied Physics,1998(7):3836-3847. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%