GaN薄膜的研究进展

功能材料, 2004, 35(5): 537-544.

GaN薄膜的研究进展

马洪磊 ^1, , 杨莺歌 ^2, , 刘晓梅 ^3, , 刘建强 ^4, , 马瑾 ^5,

1.山东大学,物理与微电子学院,山东,济南,250100

2.山东大学,物理与微电子学院,山东,济南,250100

3.山东大学,计算机科学与技术学院,山东,济南,250100

4.山东大学,物理与微电子学院,山东,济南,250100

5.山东大学,物理与微电子学院,山东,济南,250100

关键词： GaN薄膜 , 研究进展 , 发光机制

Research progress in GaN thin films

由于GaN薄膜有希望应用在紫外或蓝光发光器件、探测器以及高速场效应晶体管、高温电子器件,GaN材料是当前研究的一个焦点.本文简要介绍了GaN薄膜的制备、衬底选择、掺杂、缓冲层、发光机制和表征等方面的最新进展,指出GaN材料进一步发展需要解决的关键技术问题.

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GaN薄膜的研究进展

Research progress in GaN thin films

参考文献