耐磨、韧性好的超硬薄膜工程应用价值大.采用电弧增强磁控溅射(AEMS)技术在GCr15轴承钢表面制备了纳米复合Si-C-N超硬薄膜,研究了薄膜的形貌、相组成、硬度、韧性和摩擦磨损性能.结果表明:薄膜中纳米SiC与Si3 N4晶体弥散分布于C-C,C=C以及N-C组成的非晶相基体中,形成了纳米晶/非晶复合组织结构,显著提高了薄膜的硬度和韧性,增强了薄膜的抗摩擦磨损性能；薄膜的硬度为(36.5±3.9) GPa,断裂韧性为(4.15±0.28) MPa·m1/2,稳定摩擦系数为0.27左右.
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