Under simulated 1 keV Ar ion bombardment at low temperatures, the angular distributions of the steady sputter state of Cu-Ni alloys have been studied with the help of a dynamic Monte Carlo program. Calculations show the preferential emission of Ni in the near-normal direction, but that of Cu at oblique angles. Calculations also show that these preferential emissions strongly depend on the bulk composition. (C) 1997 American Vacuum Society.
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