研究了在透明导电ITO玻璃衬底上制备PZT-Ag2O铁电薄膜的工艺条件,并测量和表征了在不同衬底温度下生长的薄膜的相结构、表面形貌、铁电性能和光电特性.结果表明:在ITO玻璃衬底上可制备出铁电性能较好的PZT-Ag2O铁电薄膜;ITO/PZT-Ag2O/Pt铁电器件实现了可见光响应,其短路光电流和开路电压随极化电压的变化呈回线关系;产生这一现象的物理机制为:光生短路电流和开路电压的大小取决于退极化场和界面肖特基势垒的综合作用,不同的外加极化电压在PZT薄膜诱导出强度不同的退极化场,从而使光生短路电流和开路电压与外加极化电压呈回线型关系.
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